CMP SLURRY FILTER

Chemical Mechanical Planarization (CMP) is a polishing process used to manufacture wafers for the semiconductor industry. It requires the use of a polishing tool and polishing slurry. Our QXL Filter element is specifically designed for CMP Slurry applications.

For either (1) loop or recirculation filtration and 2) point-of-use(POU) filtration. The QXL Series filters combine the best features of depth filters (ability to remove a range of particle sizes due to graded pore structure, stable media configuration) with the advantages of pleated filters (high surface area for improved flow rates, lower pressure drops and longer on-stream life).

The QXL Series filters combine the best features of depth filters (ability to remove a range of particle sizes due to graded pore structure, stable media configuration) with the advantages of pleated filters (high surface area for improved flow rates, lower pressure drops and longer on-stream life).

Filter Features–Benefits

• Hybrid pleated depth construction combines graded pore structure with high surface area.
• Constructed entirely of polypropylene – Compatible with a broad range of solutions and chemicals
• Optimized pleat configuration – Provides the ideal combination of retention, flow rate and throughput
• Excellent gel and agglomerated particle retention reduces defects
• Available in common end cap configurations – Retrofits easily into most filter housings
• FDA listed materials of construction
• Meets USP Class VI Biological test for plastics

Filter Specifications

Construction material: Polypropylene
Gasket/O-Rings: Buna-N, EPDM, Silicone, Viton, Teflon
Encapsulated Viton (O-Rings only)Micron ratings: 0.1, 0.2, 0.4, 0.6, 1.0, 3.0, 5.0, 10.0μm

Dimensions and Operating Parameters

Nominal lengths: 9.75’’, 10’’, 20’’, 30’’, 40’’
Outside diameter: 2.7’’ (6.9 cm)
Inside diameter: 1.0’’ (2.54 cm)
Maximum operating temperature: 176 °F (80°C)
Maximum 80 psid @ 70°F (5.5 bar @ 21°C)
differential pressure: 40 psid @ 176°F (2.8 bar @ 80°C)
Maximum reverse differential pressure: 40 psid @ 70°F (2.8 bar @ 21°C)
Recommended changeout pressure: 35 psid (2.4 bar)