High Purity Gas Filters

 

high_purity_gas.jpg

 

PPLICATIONS:                                      

  • Semiconductor Industry                                                    
  • Zero for Particle Testing
  • Gas Cabinets
  • Valve Manifold Boxes
  • Process Tool Gas Panels
  • Research and Development
  • Specialty Gas Mixing

 

   FEATURES:

  • Ultra fine filtration down to 0.003 m
  • Particle retention up to 99.9999999% (9 log)
  • Flow rates up to 360 slpm (at 5 atm operating)
  • Inert and corrosive gas applications
  • No shedding
  • 316L SS VAR (<5 Ra EP) surface finish
  • Hastelloy C-22 housing for corrosive gases
  • Bakeable 450 C (SS) / 120 C (Ceramic)
  • High Pressure Rating (to 3000 psig)