APPLICATIONS:                                      

• Semiconductor Industry                                                    

• Zero for Particle Testing
• Gas Cabinets
• Valve Manifold Boxes
• Process Tool Gas Panels
• Research and Development
• Specialty Gas Mixing

   FEATURES:

• Ultra fine filtration down to 0.003 m
• Particle retention up to 99.9999999% (9 log)
• Flow rates up to 360 slpm (at 5 atm operating)
• Inert and corrosive gas applications
• No shedding
• 316L SS VAR (<5 Ra EP) surface finish
• Hastelloy C-22 housing for corrosive gases
• Bakeable 450 C (SS) / 120 C (Ceramic)
• High Pressure Rating (to 3000 psig)